MIPOS 800

  • 800 µm focusing range
  • Compact design
  • Resonant frequency up to 100 Hz
  • Easy to attach on microscopes
  • Closed-loop step resolution of 12 nm
  • Integrated strain-gauge feedback sensor
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MIPOS 800 – Description

The MIPOS 800 objective positioner offers a nanopositioning scanning range up to 800 µm in open-loop operation, and 650 µm in closed-loop operation. The positioner can be used with objectives that have a diameter up to 40 mm.

A unique parallelogram design guarantees high parallel motion without influencing the optical axis. The precise positioning repeatability of the MIPOS 800 can be guaranteed by the use of the integrated strain-gauge measurement system. The design which includes an integrated preload of the actuator offers high resonant frequency and a highly parallel motion.

Due to the unique design of the MIPOS 800, fast scanning applications can be accurately realized with short settling times.

Technical Data

UnitMIPOS 800MIPOS 800 SG
Part NumberO-380-50DO-380-53D
AxisZZ
Motion in Open-Loop (±10%)*μm800800
Motion in Closed-Loop (±0,2%)*μm650
Resolution Open-Loop**nm11
Resolution Closed-Loop**nm12
Dimensions (L x W x H)mm76 x 56 x 4976 x 56 x 49
Weightg350360
*Typical values measured with a 0.7 mV controller. **The resolution is only limited by the noise of the power amplifier and metrology.

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