Series R ring actuators consist of a large number of contacted ceramic discs. Compared with a tube actuator, the ring actuator reaches a higher stiffness and the expansion is twice as high.
Series R piezo actuators are without casing, and without a pre-load. They are only connected at the ceramic top and ground plate. These ring actuators (without a pre-load) should not be used in dynamic applications.
Series R actuators are for open-loop systems only.
Please ask for a screwing top plate for easy mounting of mirrors.
Technical Data
(See Datasheet PDFs below this chart for the complete list of product variations)
3 Example Products
UNIT
R 12/14
R 25/20
R 50/20
Part #
P-401-00
P-404-00
P-406-00
Motion Open-Loop (±10%)*
μm
12
25
50
Capacitance (±20%)**
μF
2.9
12
24
Stiffness
N/μm
160
160
80
Resolution Open-Loop***
nm
0.03
0.05
0.1
Dimensions – Height
mm
13.5
27
54
Outer Diameter
mm
14
20
20
*Typical value measured with an NV 40/1 CLE amplifier. **Typical value for small electrical field strength. ***The resolution is only limited by the noise of the power amplifier.
The new PAHS piezo actuators achieve higher motion than a conventional actuator of similar length. With more than four times higher travel they are a perfect solution when space is limited but high resolution requirements exist.
PAHS actuators operate with the same voltage band of 150V and can therefore be easily integrated into existing systems using the same controllers.
Like PAHL piezo actuators, PAHS actuators have high blocking forces and can move large masses. Due to the integrated mechanical pre-load, they can work under tensile forces and in dynamic applications. They also have high resonant frequencies guaranteeing fast settling times.
Technical Data
(See Datasheet PDF below this chart for the complete list of product specifications)
Models
UNIT
PAHS 40
PAHS 240
Part #
P-181-00
P-186-00
Motion @ -20…130V*
μm
40
240
Capacitance **
μF
3.5
21
Resolution OL***
nm
0.09
0.54
Dimensions – Length
mm
46
91
Diameter
mm
20
20
*Typical value measured with 0.3mV controller. **Typical value for a small electrical field strength. ***Typical values, measured at -20V…+130V.
P/S piezo actuators have a hermetically sealed housing that allows for use in aggressive and humid environments. The construction of the housing tightly encloses the stack, also reducing mechanical play.
The M3 thread in the bottom plate allows for easy adaptation in existing systems and guarantees exact positioning.
Depending on the model, these piezo actuators offer motion from 18 µm up to 70 µm.
Technical Data
(See Datasheet PDFs below this chart for the complete list of product variations)
3 Example Products
UNIT
P18/S08
P50/S13
P7/S22
Part #
P-752-30
P-755-00
P-757-50
Motion (±10%)*
μm
18
50
70
Capacitance (±20%)**
μF
0.5
4.5
21.6
Stiffness
N/μm
11.1
16
48.6
Resolution***
nm
0.03
0.1
0.14
Dimensions – Length
mm
30
71
90.5
Diameter
mm
8
12
20
*Typical value measured with an NV40/3 amplifier. **Typical value for small electrical field strength. ***The resolution is only limited by the noise of the power amplifier.
The PA, PA/T and PAHL series piezo actuators are all stack type actuators manufactured incorporating multilayer technology. They are internally pre-loaded with a mechanical spring, making them ideal for dynamic applications. The ability to generate a large force, and be subjected to high mass loading makes them particularly useful for machine tools and dynamic scanning systems. These actuators have a uniform diameter of either 14 or 20 mm depending on series. Strain gauge (SG) is used for closed-loop systems.
Piezo actuators should only be fastened with screws or clamps on the bottom plate of the actuator. During the installation and use, it is important not to subject the actuator tip to non-axial forces.
The actuator head is available in three versions: round head piece is standard, flat head option, and M3 thread on demand.
PA Series – Technical Data
(See Datasheet PDFs below this chart for the complete list of product variations)
4 Example Products
UNIT
PA 8/14
PA 120/14
PA 8/14 SG
PA 120/14 SG
Part #
B-201-00
B-214-00
B-201-01
B-214-01
Motion in Open-Loop (-10/+20%)*
μm
10
140
–
–
Motion in Closed-Loop (±0.2%)*
μm
–
–
8
112
Capacitance (±20%)**
μF
0.8
12.6
0.8
12.6
Stiffness
N/μm
85
6
85
6
Resolution in Open-Loop***
nm
0.02
0.29
–
–
Resolution in Closed-Loop***
nm
–
–
0.1
2.8
Dimensions – Length
mm
28
145
28
145
Diameter
mm
14
14
14
14
*Typical value measured with NV 40/3 (closed-loop NV 40/3 CLE). **Typical value for a small electrical field strength. ***Typical values, measured at -20 V … +130 V.
PA/T Series – Technical Data
(See Datasheet PDFs below this chart for the complete list of product variations)
4 Example Products
UNIT
PA 35/T14
PA 120/T14
PA 35/T14 SG
PA 120/T14 SG
Part #
P-354-00
P-360-00
P-354-01
P-360-01
Motion in Open-Loop (-10/+20%)*
μm
42
125
–
–
Motion in Closed-Loop (±0.2%)*
μm
–
–
34
100
Capacitance (±20%)**
μF
3.6
10.8
3.6
10.8
Stiffness
N/μm
20
7
20
7
Resolution in Open-Loop***
nm
0.08
0.25
–
–
Resolution in Closed-Loop***
nm
–
–
0.7
1.0
Dimensions – Length
mm
53
125
53
125
Diameter
mm
14
14
14
14
*Typical value measured with NV 40/3 (closed-loop NV 40/3 CLE). **Typical value for a small electrical field strength. ***Typical values, measured at -20 V … +130 V.
PAHL Series – Technical Data
(See Datasheet PDFs below this chart for the complete list of product variations)
4 Example Products
UNIT
PAHL 18/20
PAHL 200/20
PAHL 18/20 SG
PAHL 200/20 SG
Part #
P-171-00
P-180-00
P-171-01
P-180-01
Motion in Open-Loop (-10/+20%)*
μm
21
200
–
–
Motion in Closed-Loop (±0.2%)*
μm
–
–
17
160
Capacitance (±20%)**
μF
7
70
7
70
Stiffness
N/μm
165
17
165
17
Resolution in Open-Loop***
nm
0.04
0.4
–
–
Resolution in Closed-Loop***
nm
–
–
0.4
4.0
Dimensions – Length
mm
36
198
40
198
Diameter
mm
20
20
20
20
*Typical value measured with NV 40/3 (closed-loop NV 40/3 CLE). **Typical value for a small electrical field strength. ***Typical values, measured at -20 V … +130 V.
Series P and Series PHL piezo actuators are stack type actuators built in a multi-layer technique. PHL actuators are high-load. These P and PHL actuators both come without a pre-load, but they can still withstand a medium pressure force. PHL actuators are designed for high-load applications.
These piezo actuators are encased in a stainless steel housing.
P and PHL series actuators should be fastened with screws or clamps on the actuator’s bottom plate. These actuators are not designed for dynamic applications.
Technical Data
(See Datasheet PDFs below this chart for the complete list of all product variations)
4 Example Products
UNIT
P 8/8
P 80/10
PHL 18/20
PHL 100/20
Part #
P-101-00
P-117-00
P-141-00
P-145-00
Motion (-10%/+20%)*
μm
9
82
20
103
Capacitance (±20%)**
μF
0.18
7.2
7
34
Stiffness
N/μm
22
10
175
35
Resolution***
nm
0.02
0.16
0.04
0.21
Dimensions – L
mm
17
91
36
108
Diameter
mm
8
10
20
20
*Typical value measured with a NV 40/3 amplifier. ** Typical value for small signal strength. **The resolution is only limited by the noise of the power amplifier.