The PX 500 linear actuator was developed especially for OEM applications. Without external loads, the piezoelectric element can reach a motion of 500 µm.

The PX 500 piezo flexure stage is especially suited for system integration due to its small dimension. The construction is based on solid-state hinges that provide a levered transmission of the piezo elements.

The PX 500 is ideally suited for micro-positioning optical components, such as mirrors and laser diodes, or for opening and closing micro fluid valves. 

The element can be mounted to a fixture using one of the holes (2.2 mm diameter). The other hole will move in relation to this one.

The solid state flexure and parallelogram construction of these piezo stages allow travel without any mechanical play. They provide a much higher resolution than is possible with mechanical or electromechanical systems.

The PX 400 stage can be easily combined with XY and tilting piezoelectric modules offering positioning with many degrees of freedom.

These piezo elements are able to perform dynamic work such as in semiconductor, electronics, measurement and microbiology applications.

The solid state flexure and parallelogram construction of these piezo stages allow travel without any mechanical play in the X and Z directions. They provide a much higher resolution than is possible with mechanical or electromechanical systems.

The PX 200 stage can be easily combined with XY and tilting piezoelectric modules offering positioning with large degrees of freedom.

These piezo elements are able to perform dynamic work such as in semiconductor, electronics, measurement and microbiology applications.

Due to the nature of the solid state flexure and parallelogram construction, the PX 100 stage can travel without any mechanical play, and provide a much higher resolution than is possible with mechanical or electromechanical systems.

This stage can be easily combined with XY and tilting piezoelectric modules offering positioning with many degrees of freedom.

The PX 100 can be equipped with integrated measurement systems that compensates for hysteresis. Depending on the exact system configuration, very accurate repeatability in the low nanometer range is possible.

Because of the integrated preload, the elements are able to perform dynamic work. They are therefore well suited for scanning applications in optics, semiconductor and molecular biological applications.

PX products are single-axis positioning stages with a motion range up to 38 microns. Due to the nature of the solid state flexure and parallelogram construction, these stages are free of mechanical play.

Based on their compact size, they can be easily integrated into customer sized set-ups. The high performance of the piezo electrical stack type actuator is the basic feature for stage accuracy.

They are ideally suited for nanometer precise positioning of optical components such as mirrors and laser diodes, adjustment and mounting in semiconductor technologies and electronics, and applications in measurement technologies, quality assurance and microbiology.