The piezo based nanoX® 400 is our ultra fast and high load positioning stage. It provides a positioning and scanning range of up to 480 micrometers. The centrally located free aperture allows laser optical applications through the stage. This is also possible when stacking them in an X, Y configuration. Due to FEA-optimization, the nanoX® 400 provides the highest dynamical performance and excellent guiding accuracy. This is accomplished even with high mass loads in a very compact package. The nanoX series is made for nano-positioning tasks in the field of semiconductor, laser & optics and test & measurement.

Our piezo stage optimization also incorporates excellent temperature compensation properties for the trajectory of the nanopositioning stage. The sophisticated monolithic guidance design of the solid flexure hinges means the trajectory is free of mechanical play and friction – a feature of all piezo stages and nano-positioners.

Based on solid-state phenomena, piezo actuators and piezo ceramics generate pressure forces to affect the leverage geared motion. The PZT ceramic’s extension is nearly linear to the applied electric field, but hysteresis and creep still exist. Piezo electrical geared stages and positioners are neither affected by nor produce magnetic fields. In cryogenic environments piezo actuators function down to almost zero Kelvin. This low temperature is associated with linear decreasing extension behavior. In vacuum conditions, piezo actuators and PZT ceramics can be used at pressures below 10 Pa.

Because of the greatly reduced dielectric breakdown strength of air, they should not be operated in pressures ranging from 10 Pa up to 10 kPa. To avoid creep and hysteresis, the piezo nano-positioner nanoX® 400SG or nanoX® 400CAP are equipped with a high resolution measurement sensor.

In combination with the piezo controller, high stability, linearity, repeatability and accuracy are achieved during closed-loop operation.

The compact piezo stage design and the raster pin and drill holes for mounting allow an easy integration of the nano-positioning stages nanoX into your existing assembly. Vacuum and cryogenic versions are available on demand, as well as body material variations of invar, superinvar, aluminum and titanium.

The high load piezo positioner nanoX®200 is a ultra fast and high load capability nanoX® stage. It provides a positioning and scanning range of up to 240 micrometers. The centrally located free aperture allows laser optical applications. This is also possible, when stacking them in an XY configuration.

Due to FEA-optimization, the nanoX®200 provides high dynamical performance and excellent guiding accuracy. This is accomplished even with high mass loads in a very compact stage. The nanoX® series is made for nano-positioning tasks in the field of semiconductor, laser & optics and test & measurement.

Our piezo stage optimization also incorporates excellent temperature compensation properties for the trajectory of the nanopositioning stage. The sophisticated monolithic guidance design of the solid flexure hinges means the trajectory is free of mechanical play and friction – a feature of all piezosystem piezo stages and nanopositioners.

Please note: Based on solid-state phenomena, piezo actuators and piezo ceramics generate pressure forces to affect the leverage geared motion. The PZT ceramic’s extension is nearly linear to the applied electric field, but hysteresis and creep still exist. Piezo electrical geared stages and positioners are neither affected by nor produce magnetic fields. In cryogenic environments piezo actuators function down to almost zero Kelvin. This low temperature is associated with linear decreasing extension behavior. In vacuum conditions, piezo actuators and PZT ceramics can be used at pressures below 10 Pa.

Because of the greatly reduced dielectric breakdown strength of air, they should not be operated in pressures ranging from 10 Pa up to 10 kPa. To avoid creep and hysteresis, the piezo nano-positioner nanoX® 200SG / 200CAP is equipped with a high resolution measurement sensor.
In combination with the piezo controller, high stability, linearity, repeatability and accuracy are achieved during closed-loop operation. 

The compact piezo stage design and the raster pin and drill holes for mounting allow an easy integration of the nano-positioning stages nano®X into your existing assembly. Vacuum and cryogenic versions are available on demand, as well as body material variations of invar, superinvar, aluminum, or titanium.

The PU 100 consists of only one metallic part that allows for excellent mechanical stability and the ability for it to work dynamically.

This translation stage shows a nearly linear motion by an applied voltage signal from -20 up to 130 V.

This stage can be combined for XYZ 3D motion systems. The basic flexure stage is equipped with the threads for mounting. Each piezo system is supplied with the necessary screws and parts for a multi-axis configuration.

The PU 40 consists of only one metallic part that allows for excellent mechanical stability and the ability for it to work dynamically.

This translation stage shows a nearly linear motion by an applied voltage signal from -20 up to 130 V.

This stage can be combined for X, Y, Z 3D motion systems. The basic flexure stage is equipped with the threads for mounting. Each piezo system is supplied with the necessary screws and parts for a multi-axis configuration.

Due to the development of new lever transmission principles, the PX 1500 can produce a large displacement of up to 1.5 mm. This is an extraordinary parameter for a piezoelectric direct-driven system. The PX 1500 can be used in applications usually reserved for motorized linear stages only.

In comparison with motorized stages, the piezo driven PX 1500 offers important advantages – dynamic speed and single step-size resolution

The lever transmission principle is based on solid state hinges with integrated preload, that allows a high dynamic movement without mechanical play.

Because of its compact dimensions the PX 1500 is well suited for OEM applications.