PZ 400 OEM – Description
Due to solid state flexure and parallelogram construction, the PZ 400 OEM nano-positioning stage can travel without any mechanical play in the X or Z axes, and provide a much higher resolution than is possible with mechanical or electromechanical systems.
This PZ piezo stage can be easily combined with XY-elements of the XYZ series or with tilting piezoelectric modules of the PSH series to allow positioning with all degrees of freedom. Additionally this z-axis nano-positioning stage can run dynamically.
The PZ 400 OEM can optionally be equipped with an integrated measurement system (strain gauge sensors) that compensates for hysteresis.
Technical Data
UNIT | PZ 400 OEM | PZ 400 SG OEM | |
---|---|---|---|
Part # | S-628-00 | S-628-01 | |
Axis | Z | Z | |
Motion in Open-Loop (±10%)* | μm | 400 | 400 |
Motion in Closed-Loop (±0,2%)* | μm | – | 320 |
Resolution Open-Loop** | nm | 0.8 | 0.8 |
Resolution Closed-Loop** | nm | – | 8 |
Dimensions (L x W x H) | mm | 66 x 20 x 24 | 66 x 20 x 27.5 |
Weight | g | 155 | 175 |
**The resolution is only limited by the noise of the power amplifier and metrology.