Due to solid state flexure and parallelogram construction, the PZ 400 OEM nano-positioning stage can travel without any mechanical play in the X or Z axes, and provide a much higher resolution than is possible with mechanical or electromechanical systems.

This PZ piezo stage can be easily combined with XY-elements of the XYZ series or with tilting piezoelectric modules of the PSH series to allow positioning with all degrees of freedom. Additionally this z-axis nano-positioning stage can run dynamically.

The PZ 400 OEM can optionally be equipped with an integrated measurement system (strain gauge sensors) that compensates for hysteresis.

Due to solid state flexure and parallelogram construction, the PZ 400 nano-positioning stage can travel without any mechanical play in the X or Z axes, and provide a much higher resolution than is possible with mechanical or electromechanical systems.

This PZ piezo stage can be easily combined with XY-elements of the XYZ series or with tilting piezo-electric modules of the PSH series to allow positioning with all degrees of freedom. Additionally this Z-axis nano-positioning stage can run dynamically.

The PZ 400 can optionally be equipped with an integrated measurement system (strain gauge or capacitive sensors) that compensates for drift and hysteresis.

Due to solid state flexure and parallelogram construction, the PZ 200 nano-positioning stage can travel without any mechanical play in the X or Z axes, and provide a much higher resolution than is possible with mechanical or electromechanical systems.

This PZ piezo stage can be easily combined with XY elements of the XYZ series or with tilting piezoelectric modules of the PSH series to allow positioning with all degrees of freedom. Additionally this Z axis nano-positioning stage can run dynamically.

The PZ 200 can optionally be equipped with a measurement system (strain gauge or capacitive sensors) that compensates for hysteresis.

Due to solid state flexure and parallelogram construction, the PZ 38 nano-positioning stage can travel without any mechanical play in the X and Z axes, and provide a much higher resolution than is possible with mechanical or electromechanical systems.

This PZ piezo stage can be easily combined with XY-elements of the XYZ series or with tilting piezo-electric modules of the PSH series to allow positioning with all degrees of freedom. Additionally this Z-axis nano-positioning stage can run dynamically.

The PZ 38 can optionally be equipped with measurement systems (strain gauge or capacitive sensors) that compensate for hysteresis.

The nanoSX 800 combines the high accuracy and the high speed of a piezo positioning system with a special actuating design for long travel motion. The stage offer a compact design with a height of only 20 mm, outside dimensions of only 60 x 60 mm, and a free center space of 12,5 mm.

The ultra flat design of the stage and the ease to combine the stage to an XY scanning system make the system useful for a wide variety of applications.

Based on the unique bi-directional actuating nanoX design, this series can move high load masses. The design guarantees excellent guidance accuracy without parasitic motion and improves the settling time in an active manner.

The nanoSX 800 can be equipped with a high resolution feedback system for closed-loop control.

Common applications for this stage include high resolution metrology, X and XY scanning, and dynamic positioning. It is available in cryogenic and vacuum compatible versions.