PXY 100 – Description
The PXY 100 solid-state hinges in a parallelogram construction provide parallel motion without mechanical play in the X and Y directions. This construction design results in a high resolution solution which far surpasses the resolution of mechanical and electromechanical positioning systems.
The nanopositioning PXY 100 can easily be mounted to other positioning systems and can be equipped with strain gauge measurement to overcome the effect of hysteresis. Cryo and vacuum PXY 100 versions are also available.
Dynamic operation is possible. The PXY 100 is well suited for solving scanning issues.
Technical Data
UNIT | PXY 100 | PXY 100 SG | PXY 100 CAP | |
---|---|---|---|---|
Part # | T-203-00 | T-203-01 | T-203-06 | |
Axis | X, Y | X, Y | X, Y | |
Motion in Open-Loop (±10%)* | μm | 100 | 100 | 100 |
Motion in Closed-Loop (±0.2%)* | – | 80 | 80 | |
Resolution Open-Loop** | nm | 0.2 | 0.2 | 0.2 |
Resolution Closed-Loop** | – | 2 | 1 | |
Dimensions (L x W x H) | mm | 40 x 40 x 20 | 60 x 60 x 21 | 65 x 65 x 20 |
Weight | g | 102 | 175 | 300 |