The piezo positioning PXY 40 D12 stage was developed for STM and AFM applications. This nanopositioner is optimized for high resonant frequencies and high stiffness in both axes. It was designed for typical line scanning applications, where quick and precise line movements and positioning is required.

The short settling time after a jump or a change of position was a key design goal. Piezo based electrical actuators and piezo-mechanic stages are well known for high resolution movement and long term positioning stability.

For special applications, the nanopositioner can be optimized for minimum deviation in the Z direction while moving in the X and Y directions.

The nanoSXY 400 combines the high accuracy and speed of a piezo positioning system with a special actuating design for long travel motion. The stage offers a compact design with a height of only 20 mm, outside dimensions of only 60 x 60 mm, and a free center space of 12.5 mm.

The ultra flat design of the stage and the easy ability to combine it with an XY scanning system, makes the system especially useful for a wide variety of applications.

Based on the unique bi-directional actuating nanoX design, the nanoSXY 400 can move high load masses with a resolution of 0.6 nm. The design also guarantees excellent guidance accuracy without parasitic motion and improves the settling time actively. The stage can be equipped with a high resolution feedback system for closed-loop control.

Fields of application include high resolution metrology, X and XY scanning, and dynamic positioning. The stages are also available in cryogenic and vacuum versions.

The nanoSXY 120 combines the high accuracy and speed of a piezo positioning system with a special actuating design for long travel motion. The stage offers a compact design with a height of only 20 mm, outside dimensions of only 60 x 60 mm, and a free center space of 12.5 mm.

The ultra flat design of the stage and the easy ability to combine it with an XY scanning system, makes the system especially useful for a wide variety of applications.

Based on the unique bi-directional actuating nanoX design, the nanoSXY 120 can move high load masses with a resolution of 0.25 nm. The design also guarantees excellent guidance accuracy without parasitic motion and improves the settling time actively. The stage can be equipped with a high resolution feedback system for closed-loop control.

Fields of application include high resolution metrology, X and XY scanning, and dynamic positioning. The stages are also available in cryogenic and vacuum versions.

The PXY 200 uses solid state hinges in a parallelogram construction to provide parallel motion without mechanical play in the X and Y directions. This design result in high resolution which far surpasses the resolution of mechanical and electromechanical positioning systems.

The piezo positioner PXY 200 series can be easily mounted to other positioning systems and can be equipped with a strain gauge measurement system that overcomes the effect of hysteresis.

Dynamic operation is possible due to the piezo elements which are well suited for solving scanning problems.

The PXY 102 piezo stage is compact and offer motions of up to 100 µm in open-loop in X and Y axes. The unique cube-like mechanical design allows parallel motion without play. It is well suited for many applications reaching from optical research to OEM systems. Probe alignment in microscopes usually requires an open center space for the passage of light. The PXY 102 with it’s central aperture of 40 mm was developed considering this application.

High stiffness, in combination with excellent straightness of motion, makes the PXY 102 ideal for high precision in the nanometer range for optics, laser technique, and any other types of high resolution positioning applications.

Piezoelectric actuators can work much faster and with a higher accuracy to a signal change, than motorized drives. Each axis can be controlled separately in closed-loop mode. An integrated sensor system is an available option that guarantees accuracy in the nanometer range.

The simultaneous motion in XY directions offers a large degree of freedom during use. The PXY 102 can be made with special materials for extraordinary applications such as working in a vacuum or cryogenic environment.