The MIPOS is specifically designed for high precision positioning of optical systems with accuracy in the sub-nanometer range. The high resolution and fast response time of the MIPOS 16 offer new possibilities, especially for white light interferometers.

Based on its unique design, which includes an aperture up to 104 mm and a stage height down to 42 mm, the MIPOS 16 offers technical specifications that match the requirements for white light interferometry. White light interferometry has become one of the most effective 3D surface measurement methods. Piezoelectric actuators are able to significantly improve accuracy and speed due to their virtually unlimited resolution and fast response time. The MIPOS 16 can achieve a focus range of up to 16 µm and a single step resolution of less than 0.1 nm, while operating in a voltage range between 20 and 130 V.

The MIPOS 16 is made for integration into metrology set-ups and devices. The robust drive is equipped with a high resolution piezo based actuating system. The internal mechanical pre-load design enables the MIPOS to operate in highly dynamic environments while reducing the settling time down to microseconds.

The systems of the MIPOS 600SG OEM series offer a nano-positioning and scanning range up to 600 µm in open-loop operation, and 500 µm in closed-loop. They can be assembled with objectives with a diameter of up to 40 mm.

Unique parallelogram design guarantees high parallel motion without influencing the optical axis. The precise positioning repeatability of the MIPOS 600SG OEM can be guaranteed by the use of the integrated measurement system. The design which includes an integrated preload of the actuator offers high resonant frequency and highly parallel motion.

Due to the unique features of the MIPOS 600 series, fast scanning applications can be accurately realized with the shortest settling times.

The systems of the MIPOS 500 series offer a nano-positioning and scanning range up to 500 µm in open-loop operation, and 400 µm in closed-loop. They can be assembled with objectives that have a diameter of up to 40 mm.

Parallelogram design guarantees high parallel motion without influencing the optical path. The precise positioning repeatability of the MIPOS 500 series can be guaranteed by the use of the optional integrated measurement system. The design includes an integrated pre-load of the actuator that offers high resonant frequency and highly parallel motion – and is available in an upside-down version for inverted microscopes.

Due to the unique features of the MIPOS 500 series, fast scanning applications can be accurately realized with the shortest settling times.